Silicon nitride (SiN) is used in antireflection wafer coating and in surface and bulk passivation. For preheating and coating, AEG Power Solutions thyristor power controllers regulate the electric power for controlling process temperature in the heating elements used in this process. With an economic bus module interface, up to eight power controllers in one bus can be connected to almost any DCS. With the Thyro-Tool software, the necessary parameters can be set easily and fast enabling you to deliver repeatable quality reliably.
Based on reliable, established power technology designs of standard products and power components, AEG Power Solutions offers electric power supply solutions that are tailored to the requirements of each individual system. Specific customized requirements regarding the power supply can be implemented in the Thyrobox on request to suit particularities within the production process. Focused on minimizing investments and operational costs (CAPEX, OPEX), AEG’s power supply solutions are designed, built, and tested at our facility in Warstein-Belecke – Made in Germany.