Thyrobox PI for Polysilicon Systems

power supply, polysilicon production

Power supply systems for the production of polysilicon

Used successfully worldwide, Thyrobox power supply systems are synonymous with utmost reliability and repeatability in the polysilicon production process.

As global market leader in the field of power supplies for polysilicon production, AEG Power Solutions provide custom solutions that are tailor-made for the polysilicon process. Owing to their state-of-the-art AC technology, AEG’s Thyrobox power supply systems are extremely energy-efficient and reliable as compared with other technologies.

Typical Thyrobox applications in polysilicon production include power supplies for the direct heating of polysilicon rods in the D reactor, also called deposition reactor, and for the direct heating of graphite elements in the H reactor (STC-TCS converter).

power supply, polysilicon production

The illustration depicts different deposition reactor designs.

Thyrobox power supply systems meet the complex demands of both D and H reactors. The following illustration shows standard power supplies currently in use.

Thyrobox Reliable quality power supply systems for polysilicon production

Thyrobox M


Modular systems for medium-voltage ignition, pre-heating and process heating for the CVD deposition process in reactors having 12, 18, 24 and 27-rod pairs

Thyrobox MV-I


Power supply system for medium-voltage ignition of silicon rod pairs as a add-on for existing Thyrobox VSC power supply systems

Thyrobox VSC-C


Power supply system for H reactors with multi-level VSC circuits

Thyrobox PI

Thyrobox PI, with its breakthrough patented technology, is the tool for improved competitiveness:

• Increase of deposition temperature
• Increase of rod diameter
• Prevention of rod core from melt down
• Reduction of mechanical stress in rods
• Avoidance of rod cracks and system shutdown
• Reduction of hot spots

Minimization of the well-known technical problems inside the reactor is the basis for a faster deposition process but with fewer problems. The modular Thyrobox PI can be used for all deposition reactors equipped with Thyrobox VSC or Thyrobox M.


Thyrobox PI-Highlight of the power supply

Based on long years of experience and Thyrobox components which have a proven on-site record, ongoing design innovation offers the customer complete solutions that are both state-of-the-art and competitive in the polysilicon industry.

The latest milestone in the Thyrobox power supply design is Thyrobox PI.

Thyrobox™ Process optimization for increasing production volume

Thyrobox PI


Power supply system for enhancing the deposition process(PI = process improvement)

Add-on power supply for Thyrobox M or Thyrobox VSC for increasing the output and enhancing the quality of silicon deposits

Applications in all reactors, e.g., 12, 18, 24 and 27 pair-reactors

Thyrobox PI stands for Process Improvement and represents enormous benefits for the power supply system, including:

- Minimizing problems in the deposition process

- Increase of rod diameter 

This results in an overall annual increase in the production volume of the polysilicon plant. Further information on the Thyrobox PI is available in the flyers pertaining to this subject.

power supply, polysilicon production

Thyrobox for D Reactors

Thyrobox M for 24 pairs of rods

W x H x D: 4400 x 2200 x 1600[mm]

The illustration shows a Thyrobox M for a 24-pair CVD reactor. Features include a medium-voltage ignition for all rods in the reactor and power supply for the CVD process.

Worldwide service

All Thyrobox power supply systems from AEG Power Solutions worldwide are installed and maintained by a team of well-qualified service technicians having on-site experience with the reactor power supplies used in the production of polysilicon.

Further information

You can find further information about AEG Power Solutions and Thyrobox power supply systems for the production of polysilicon at the following website:



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Betriebskostensenkung durch Blindleistungsoptimierte Prozess-Stromversorgungen 100 KW – 25.000 KW


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